| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond grinding wheel to efficiently machine a hard material such as silicon carbide and to have a long life, and also to provide a method of manufacturing the same. SOLUTION: The diamond grinding wheel includes a base material and diamond grown on the surface of the base material. Diamond particles having 3 μm or more diameters, preferably 45 μm or less diameters, are scattered on the base material, preferably in an occupancy rate of 10% or more and 50% or less. A base material having a flat surface with the surface roughness R(a) of 0.01 μm or more and 1.0 μm or less is prepared, and the diamond particles are grown on the flat surface of the base material with a microwave plasma CVD method by the use of material gas preferably including 0.5-8% methane, 91-99% hydrogen, and 0.1-1.8% oxygen. COPYRIGHT: (C)2011,JPO&INPIT |
