LASER DEVICE, LIGHT SOURCE DEVICE, METHOD OF ADJUSTING THOSE, LIGHT IRRADIATION DEVICE, EXPOSURE DEVICE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a laser device such that a spectrum width of output light can be adjustable with simple constitution, and to provide a light source device and methods of adjusting them.

SOLUTION: The light source device 1 includes the laser device 10 and a wavelength conversion unit 30. The laser device 10 includes: a laser light emission unit 11 which emits single-wavelength pulsed light; an optical amplification unit 12 which amplifies the pulsed light Ls emitted by the laser light emission unit 11; a pulsed light modulation unit 15 which temporally segments a portion of the pulsed light La amplified by the optical amplification unit 12 to emit short pulsed light Lp; and a timing adjustment unit comprising a delay adjusting unit 87 and a trigger pulse delay unit 84 which adjust the timing of segmentation by the pulsed light modulation unit 15.

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