| 摘要 |
A method of forming a semiconductor device is presented. A conductor is embedded within a substrate, wherein the substrate contains a non-conducting material. The backside of the substrate is ground to a thickness wherein at least 1μm of the non-conducting material remains on the backside covering the conductor embedded within the substrate. Chemical mechanical polishing (CMP) is employed with an undiscerning slurry to the backside of the substrate, thereby planarizing the substrate and exposing the conductive material. A spin wet-etch, with a protective formulation, is employed to remove a thickness y of the non-conducting material from the backside of the substrate, thereby causing the conductive material to uniformly protrude from the backside of the substrate.
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