摘要 |
PROBLEM TO BE SOLVED: To form a γ-alumina base hard film excellent in wear resistance and heat resistance at or below 1000°C, and to provide a wear resistant member having the film. SOLUTION: A hard film forming member is obtained by putting a hard film based on an aluminum oxide on a base material. The hard film has a composition indicated by Al<SB>1-x</SB>M<SB>x</SB>(O<SB>1-y</SB>N<SB>y</SB>)<SB>z</SB>(0≤x≤0.5, 0<y≤0.4, z>0), and M in the composition is at least one of elements selected from Ti, Zr, V, Nb, Mo, W, Y, Mg, Si and B. Such a hard film is formed with the temperature of the base material at 400-600°C. COPYRIGHT: (C)2011,JPO&INPIT
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