发明名称 |
Flexibly Deformable Holding Element For Substrates |
摘要 |
Flexibly deformable holding elements operate such that substrates can be held in a fixed manner at a surface of the holding element electrostatically or also by means of negative pressure and planar positional deviations or unwanted deformations can be compensated simply and reliably, where at least one cut-out having an opening arranged at the rear side is formed at the rear side of the holding element which is disposed opposite the surface, and an actuator is arranged there exerting compressive forces or pulling forces for a widening or narrowing of the cut-out and/or for a deformation of the holding element.
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申请公布号 |
US2010265485(A1) |
申请公布日期 |
2010.10.21 |
申请号 |
US20090565121 |
申请日期 |
2009.09.23 |
申请人 |
FRAUHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
KALKOWSKI GERHARD;RISSE STEFAN;PESCHEL THOMAS;DAMM CHRISTOPH |
分类号 |
G03B27/58 |
主分类号 |
G03B27/58 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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