| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron source that suppresses a temperature rise caused by evaporation consumption with time of a diffusion source of the electron source in order to give a stable electron beam. <P>SOLUTION: The electron source is formed of a cathode comprising a <100> orientation single-crystal of tungsten or molybdenum, a diffusion source provided at the middle part of the cathode, and a high-melting-point metal provided on the outer periphery of the diffusion source. Another electron source includes a cathode comprising a <100> orientation single-crystal of tungsten or molybdenum, and each diffusion source included in a porous body of a high-melting-point metal provided at the middle part of the cathode. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
