FLAT PANEL DISPLAY MANUFACTURING METHOD

摘要

An alignment mark having high precision and good visibility is formed in a simple manner without modification of a manufacturing line or a significant increase of man hours and a flat panel display is manufactured at low cost and with good productivity. To achieve this, the method includes a step of forming a photosensitive film on a substrate, a step of forming an alignment mark (51) by exposing the photosensitive film by using an exposing mask (41), and a step of performing position alignment by recognizing the alignment mark (51) in an undeveloped state of the photosensitive film.