TEST STRUCTURE FOR GRADUATING SCANNING PROBE MICROSCOPES

摘要

FIELD: physics. ^ SUBSTANCE: invention discloses a structure consisting of a base on which there are nanotubes having known geometrical and physical parametres and fullerenes C60 which form a separate single-layer spatially bordered film on the surface of the base. The technical result is using nanotubes which are ideal cylindrical objects with a nanosized diametre, which enables use of the test structure for accurate determination of the rounded radius of a needle point in atomic-force and tunnel microscopes. ^ EFFECT: use of single-layer fullerenes C60 provides a measure of length on the test structure for vertical and lateral displacements of the probe point relative the base with known accuracy. ^ 1 dwg