PROCESS FOR POLISHING A SILICON SURFACE BY MEANS OF A CERIUM OXIDE-CONTAINING DISPERSION,申请号EP20080872129-传众专利搜索

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发明名称	PROCESS FOR POLISHING A SILICON SURFACE BY MEANS OF A CERIUM OXIDE-CONTAINING DISPERSION
摘要
申请公布号	EP2240547(A1)	申请公布日期	2010.10.20
申请号	EP20080872129	申请日期	2008.12.12
申请人	EVONIK DEGUSSA GMBH	发明人	KROELL, MICHAEL;KRAEMER, MICHAEL;ZWICKER, GERFRIED;TORKLER, MICHAEL
分类号	C09G1/02;C09K3/14;H01L21/306;H01L21/3105	主分类号	C09G1/02
代理机构		代理人
主权项
地址

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