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发明名称
EXTRUSION REDUCTION IN IMPRINT LITHOGRAPHY
摘要
申请公布号
EP2240826(A1)
申请公布日期
2010.10.20
申请号
EP20090707380
申请日期
2009.02.09
申请人
MOLECULAR IMPRINTS, INC.
发明人
KHUSNATDINOV, NIYAZ;JONES, CHRISTOPHER E.;PEREZ, JOSEPH G.;LABRAKE, DWAYNE L.;MCMACKIN, IAN MATTHEW
分类号
G03F7/00;G03F7/20
主分类号
G03F7/00
代理机构
代理人
主权项
地址
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