| 发明名称 |
Imprinting machine and device manufacturing method |
| 摘要 |
An imprinting machine that brings a mold having a pattern into contact with an object and transfers the pattern onto the object includes a measurement unit that measures a position of the mold when the mold contacts the object. |
| 申请公布号 |
US7815424(B2) |
申请公布日期 |
2010.10.19 |
| 申请号 |
US20050297031 |
申请日期 |
2005.12.07 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
NAKAMURA TAKASHI;OTA HIROHISA;KAWAKAMI EIGO;KASUMI KAZUYUKI;TOKITA TOSHINOBU |
| 分类号 |
B29C59/02 |
主分类号 |
B29C59/02 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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