Surface acoustic wave sensor

摘要

A surface acoustic wave sensor for detecting a target substance by measuring the change in frequency due to the mass applied to a reaction membrane placed on a surface acoustic wave element having high sensitivity due to the improvement of the surface acoustic wave element structure. The surface acoustic wave sensor includes an SH-type surface acoustic wave and a rotated Y-cut LiTaO3 substrate having Euler angles (0°, 120° to 140°, 0°±5°); electrodes principally containing Au, for exciting a surface acoustic wave, the electrodes being arranged on the LiTaO3 substrate; and a reaction membrane bound to a target substance or a binding substance bound to the target substance covering the electrodes arranged on the LiTaO3 substrate. The interdigital transducers have a normalized thickness of about 3.0% to about 5.0%, the normalized thickness being determined by normalizing the thickness of the interdigital transducers by the wavelength of the surface acoustic wave.