发明名称 ONE-DIMENSIONAL ARRAYS OF BLOCK COPOLYMER CYLINDERS AND APPLICATIONS THEREOF
摘要 Methods for fabricating sublithographic, nanoscale microstructures in one-dimensional arrays utilizing self-assembling block copolymers, and films and devices formed from these methods are provided.
申请公布号 KR20100112196(A) 申请公布日期 2010.10.18
申请号 KR20107020026 申请日期 2009.01.27
申请人 MICRON TECHNOLOGY, INC. 发明人 MILLWARD DAN B.;STUEN KARL
分类号 B82B3/00;B81C1/00 主分类号 B82B3/00
代理机构 代理人
主权项
地址