MEASUREMENT UNIT, DEVICE FOR MEASURING NEUTRAL PARTICLE BEAM, AND MEASUREMENT SYSTEM OF NEUTRAL PARTICLE BEAM

摘要

PROBLEM TO BE SOLVED: To provide a measurement unit capable of observing characteristics of a neutral particle beam (total energy flux, remaining ions and optical energy flux) at the same position as an workpiece to obtain a processing state of the workpiece to be irradiated with the neutral particle beam. SOLUTION: The measurement unit 12 includes at least a chip-state base material which is in a vacuum treatment space and capable of housed in the same region as the workpiece 11 to be irradiated with the neutral particle beam, and a measurement unit for the total energy flux and a measurement unit for the remaining ions arranged on the base material. COPYRIGHT: (C)2011,JPO&INPIT