| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing liquid supply device that can stably supply a processing liquid to a plurality of processing units while simplifying the constitution and reducing the cost, and to provide a processing liquid supply method. SOLUTION: A chemical cabinet 1 supplies the processing liquid to the plurality of substrate processing units 5 for processing a substrate W with the processing liquid. The chemical cabinet 1 includes a plurality of component liquid supply sources 11-15, a plurality of component liquid supply paths 21-25 for guiding component liquids, a mixing unit 70 for preparing the processing liquid by putting together and mixing the component liquids guided by those component liquid supply paths 21-25, and a processing liquid distribution path 71 for distributing the processing liquid from the mixing unit 70 to the plurality of substrate processing units 5. Automatic flow control valves 51-55 are interposed in the component liquid supply paths 21-25. Component liquid regulators 31-35 are interposed between the component liquid supply sources 11-15 and the automatic flow control valves 51-55 to control the component liquid supply pressure of supply paths 21-25 to equal component liquid supply pressure. COPYRIGHT: (C)2011,JPO&INPIT
|
