| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of an element in which a capacitance element and a resistance element are three-dimensionally constituted in which the capacitance value of the capacitance element cannot be increased since an upper electrode of the capacitance element is used also as the resistance element. SOLUTION: According to the structure of the semiconductor device, the capacitance value of the capacitance element can be increased even when the capacitance element and the resistance element are three-dimensionally constituted. Namely, a recessed part or stepped part is provided in a lower electrode of the capacitance element, and the upper electrode is provided so as to be fitted therein. Since the contact area between the upper electrode and the lower electrode is increased accordingly, the capacitance value of the capacitance element can be increased without reducing the resistance value even when the upper electrode is used as the resistance element. Since the recessed part or stepped part is provided in the lower electrode, the capacitance element can be smoothed. COPYRIGHT: (C)2011,JPO&INPIT
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