| 摘要 |
PROBLEM TO BE SOLVED: To obtain an X-ray inspection apparatus for detecting a foreign substance, even if the small foreign substance is mixed in the vicinity of an end of a to-be-inspected object. SOLUTION: The X-ray inspection apparatus includes X-ray sources 11, 12 for irradiating the to-be-inspected object carried in the Y-axis direction by a carrier conveyer 10 with X rays; and X-ray detectors 13, 14, corresponding to the X-ray sources 11, 12 and detecting the X rays irradiated by the X-ray sources 11, 12 and transmitted through the object to be inspected 1. The X-ray source 11 is disposed so as to irradiate the fan-shaped X rays centered at one end of the object to be inspected 1, in the width direction from the upside of the to-be-inspected object 1 as the Z-axis direction in Fig.1. The X-ray source 12 is disposed so as to irradiate the fan-shaped X rays centered at the other end of the object to be inspected 1 in the width direction from the upside of the object to be inspected 1 as the Z-axis direction, in Fig.1. COPYRIGHT: (C)2011,JPO&INPIT
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