| 摘要 |
<P>PROBLEM TO BE SOLVED: To solve the problem, wherein since a wave front sensor has a trade-off relation between the resolution of an inclination of a wave front and plane resolution and a light sensor has trade-off relation between the resolution of a light direction and the plane resolution, simultaneous and high-accuracy detection of the both sensors is restricted. <P>SOLUTION: An optical sensor 1, including a microlens array 2 and detection elements 6 arranged at least one-dimensionally at a prescribed pitch, includes a light deflection element capable of displacing an irradiation position of light from each microlens constituting the microlens array 2 to the detection element 6 to a prescribed pitch direction. <P>COPYRIGHT: (C)2011,JPO&INPIT |
