| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of fabricating a semiconductor device having two or more kinds of light receiving elements with a reduced number of steps at a low cost. <P>SOLUTION: The method includes: forming an active region for a control circuit transistor 20 on a semiconductor substrate 18; and forming n-type wells 36, 44, p-type wells 38, 46 and the like which constitute photodiodes 22, 24, before forming the control circuit transistor 20. When the n-type wells 36, 44 and the like are formed on the semiconductor substrate 18, photoresists or the like are formed on the semiconductor substrate 18 with the active region being used as a positioning reference. Accordingly, the n-type wells 36, 44, p-type wells 38, 46 and the like are formed on the semiconductor substrate 18 with a high precision. Since it is not necessary to form a positioning mark preliminarily on the semiconductor substrate 18, the semiconductor device 10 is fabricated with the reduced number of steps, and thereby at a low cost. <P>COPYRIGHT: (C)2011,JPO&INPIT |
