| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric/electrostrictive membrane element having a large flexural displacement with suppressed disadvantages such as the occurrence of micro cracks and lattice defects due to a concentrated stress. <P>SOLUTION: The piezoelectric/electrostrictive membrane element includes a substrate of a ceramics material, a membrane piezoelectric/electrostrictive portion including a piezoelectric/electrostrictive body constituted of a large number of crystal particles 10, 20 of lead zirconate titanate based piezoelectric/electrostrictive ceramic composition, and membranous electrodes electrically connected to the piezoelectric/electrostrictive portion, wherein the crystal particles 10, 20 include crystal body portions 13, 23 and surface layer portions 15, 25 arranged in at least part of the outer periphery of the crystal body portions 13, 23 and having a crystal structure which is different from that of the crystal body portions 13, 23, the crystal structure of the crystal body portion includes at least the tetragonal structure, the crystal structure of the surface layer portion includes at least one kind of crystal structure selected from a group of the rhombohedral structure, the monoclinic structure, and the pseudo cubic structure, and the piezoelectric/electrostrictive portion is boded in a solid state to the substrate directly or via electrodes. <P>COPYRIGHT: (C)2011,JPO&INPIT |
