发明名称 DRY ICE SNOW WASHING APPARATUS AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a dry ice snow washing apparatus capable of preventing the generation of particles inside a capillary. SOLUTION: The dry ice snow washing apparatus includes an orifice 3 for expanding and cooling liquefied carbon dioxide supplied from a supply source, the capillary 2 from the orifice 3 to an injection nozzle 1, the injection nozzle 1 to which the capillary 2 is connected for injecting dry ice snow, and an injection gas supply pipe 4 for supplying the injection gas of the dry ice snow to the injection nozzle 1. By providing a heating means for heating the capillary 2 from the outer side on a part more on the upstream side than the merging part of the injection gas supply pipe 4 in the capillary 2, the inner surface of the capillary 2 is kept at a temperature higher than the temperature of dry ice, a thin gas layer is formed on the inner surface of the capillary 2, solid dry ice is prevented from colliding with the inner surface of the capillary 2, and the generation of the particles is prevented. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010227741(A) 申请公布日期 2010.10.14
申请号 JP20090075314 申请日期 2009.03.26
申请人 AIR WATER INC 发明人 UKAWA TADASHI
分类号 B08B7/00;B05B7/04;H01L21/304 主分类号 B08B7/00
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