发明名称 MIRROR FOR GUIDING A RADIATION BUNDLE
摘要 A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved.
申请公布号 US2010261120(A1) 申请公布日期 2010.10.14
申请号 US20100707783 申请日期 2010.02.18
申请人 CARL ZEISS SMT AG 发明人 WALDIS SEVERIN;BACH FLORIAN;BENZ DANIEL;WERBER ARMIN;NOELL WILFRIED;EHM DIRK HEINRICH;WIESNER STEFAN;KRAUS DIETER
分类号 G03F7/20;G02B7/192;G03B27/72 主分类号 G03F7/20
代理机构 代理人
主权项
地址