发明名称 |
MIRROR FOR GUIDING A RADIATION BUNDLE |
摘要 |
A mirror serves for guiding a radiation bundle. The mirror has a basic body and a coating of a reflective surface of the basic body, the coating increasing the reflectivity of the mirror. A heat dissipating device serves for dissipating heat deposited in the coating. The heat dissipating device has at least one Peltier element. The coating is applied directly on the Peltier element. A temperature setting apparatus has at least one temperature sensor for a temperature of the reflective surface. A regulating device of the Temperature setting apparatus can be connected to the at least one Peltier element and is signal-connected to the at least one temperature sensor. The result is a mirror in which a heat dissipating capacity of the heat dissipating device is improved.
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申请公布号 |
US2010261120(A1) |
申请公布日期 |
2010.10.14 |
申请号 |
US20100707783 |
申请日期 |
2010.02.18 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
WALDIS SEVERIN;BACH FLORIAN;BENZ DANIEL;WERBER ARMIN;NOELL WILFRIED;EHM DIRK HEINRICH;WIESNER STEFAN;KRAUS DIETER |
分类号 |
G03F7/20;G02B7/192;G03B27/72 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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