发明名称 DIAMOND ELECTRODE STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide a diamond electrode structure which exhibits functions, while maintaining the quality of a junction between a metal and diamond even at high temperatures, or even in a strong reactive chemical substance. SOLUTION: The diamond electrode structure achieves electrical junction by providing a diamond on which an electrode made of ruthenium (Ru) or ruthenium oxide (RuO<SB>2</SB>) is provided. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010232566(A) 申请公布日期 2010.10.14
申请号 JP20090080714 申请日期 2009.03.28
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY 发明人 IKEDA KAZUHIRO;UMEZAWA HITOSHI;SHIKADA SHINICHI
分类号 H01L21/28 主分类号 H01L21/28
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