SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate processing apparatus is provided to insert a solution collected inside a nozzle washing device into a housing using pipes, and to reduce the usage amount of an exhaust pipe and a waste water pipe. CONSTITUTION: A substrate processing apparatus is installed on the upper side of a substrate returning to a first direction, to discharge processing liquid. The substrate processing apparatus includes the following: a nozzle(55) extended to a second direction crossing the first direction; a roller(95) controlling the processing liquid at the tip end of the nozzle; a housing(96) receiving the roller; and a nozzle washing device washing the nozzle with a washing solution.