发明名称 Method for fast filling of templates for imprint lithography using on template dispense
摘要 A method of depositing material upon a substrate features filling recesses of a substrate with liquid and removing material present on the substrate, outside of the recesses using fluid, i.e., apply a vacuum of a jet of fluid. To that end, one method of the present invention includes depositing a measure of liquid upon a surface of a substrate having a recess formed therein to ingress into a volume of the recess with a portion of the liquid. A quantity of the liquid is disposed upon regions of the surface proximate to the recess. Thereafter, the quantity of liquid is removed while maintaining the portion within the volume. In this manner, the portion may be transferred onto an additional substrate. More specifically, the portion may be placed in contact with a layer of flowable material and cross-linking therewith by exposing the liquid and the flowable material to actinic radiation.
申请公布号 US7811505(B2) 申请公布日期 2010.10.12
申请号 US20050101140 申请日期 2005.04.07
申请人 MOLECULAR IMPRINTS, INC. 发明人 MCMACKIN IAN M.;LAD PANKAJ B.;TRUSKETT VAN N.
分类号 B28B3/00;B28B17/00;H01L25/00 主分类号 B28B3/00
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