发明名称 Apparatus having gate structure and source/drain over semiconductor substrate
摘要 A semiconductor device including a gate insulating layer formed over a semiconductor substrate; a gate insulating layer pattern formed over an exposed uppermost surface of the semiconductor substrate along the same horizontal plane as the gate insulating layer; an isolation insulating layer formed over the gate insulating layer; a plurality of first gate conductive patterns formed over the gate insulating layer and the gate insulating layer pattern; a source/drain conductor formed over an exposed uppermost surface of the semiconductor substrate; a second gate conductive pattern formed over one of the plurality of the first gate conductive patterns that is provided over the gate insulating layer pattern; a plurality of salicide layers formed over the second gate conductive pattern, the source/drain conductor, and at least one of the plurality of first gate conductive patterns that are provided over the gate insulating layer; and a pair of spacers formed over the gate insulating layer pattern and on sidewalls of one of the plurality of first gate conductive patterns that is provided over the gate insulating layer pattern, the second gate conductive pattern, and the plurality of salicide layers.
申请公布号 US7812415(B2) 申请公布日期 2010.10.12
申请号 US20070944592 申请日期 2007.11.23
申请人 DONGBU HITEK CO., LTD. 发明人 PARK JEONG-HO
分类号 H01L29/78 主分类号 H01L29/78
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