APPARATUS FOR PLASMA TREATMENT

摘要

PURPOSE: An apparatus for plasma treatment is provided to maximize a modification effect on the surface of an LED package due to plasma by using a magazine as an electrode. CONSTITUTION: A plasma processing apparatus comprises a chamber(10), a first electrode(20), a second electrode(30), and at least one magazine electrode(40). A first electrode is arranged inside the chamber. A second electrode is arranged inside the chamber and separated from the first electrode. A second electrode has at least one mounting unit. A magazine electrode is detachable from the mounting unit of the second electrode. A plurality of LED packages are loaded in the magazine electrode. The second electrode and magazine electrode are formed with the same conductive material.