发明名称 X-RAY IMAGING DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide an X-ray imaging device which can block the effect of noise light detection on X-ray detection. <P>SOLUTION: This X-ray imaging device 1 consists of a backside-incident type solid-state image sensor 10, in which an X-ray detecting section with plural detection pixels for detecting incident X rays arranged is located on one surface 11 side, while the other-surface side 12 is an X-ray incidence plane, and a shielding layer 20 prepared on the incidence plane 12 of the image sensor 10 to be used for shielding a light of wavelength longer than that of the X-ray under detection. The shielding layer 20 includes the first aluminum layer 21 prepared directly on the incidence plane 12, the second aluminum layer 22 prepared on the first aluminum layer 21, and an ultraviolet-ray shielding layer 25, arranged in between these first and second aluminum layers 21, 22 to be used for shielding the ultraviolet rays. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2010223922(A) 申请公布日期 2010.10.07
申请号 JP20090074656 申请日期 2009.03.25
申请人 HAMAMATSU PHOTONICS KK 发明人 TAKAGI SHINICHIRO;YONEDA YASUTO;SUZUKI HISANORI;MURAMATSU MASAHARU;TSUNEMI HIROSHI;TSURU GO;DOYA TADAYASU;YUKIMURA TAKAYOSHI
分类号 G01T1/24;H01L27/14;H01L31/09 主分类号 G01T1/24
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