摘要 |
<P>PROBLEM TO BE SOLVED: To provide an X-ray imaging device which can block the effect of noise light detection on X-ray detection. <P>SOLUTION: This X-ray imaging device 1 consists of a backside-incident type solid-state image sensor 10, in which an X-ray detecting section with plural detection pixels for detecting incident X rays arranged is located on one surface 11 side, while the other-surface side 12 is an X-ray incidence plane, and a shielding layer 20 prepared on the incidence plane 12 of the image sensor 10 to be used for shielding a light of wavelength longer than that of the X-ray under detection. The shielding layer 20 includes the first aluminum layer 21 prepared directly on the incidence plane 12, the second aluminum layer 22 prepared on the first aluminum layer 21, and an ultraviolet-ray shielding layer 25, arranged in between these first and second aluminum layers 21, 22 to be used for shielding the ultraviolet rays. <P>COPYRIGHT: (C)2011,JPO&INPIT |