ULTRAPURE WATER PRODUCTION FACILITY AND METHOD OF MONITORING ULTRAPURE WATER

摘要

Disclosed is an ultrapure water production facility wherein the cost of an ultrapure water production unit is reduced by reducing the quantity of water required for monitoring the ultrapure water by measuring the quality thereof by means of a plurality of instruments and thereby reducing the scale of the ultrapure water production unit. When the water quality is monitored by sampling a portion of the ultrapure water being fed from an ultrapure water production unit to a use point, the water is made to flow through a monitoring device consisting of different types of water quality measurement instruments coupled in series in two stages or more and then the water quality is monitored. Since the ultrapure water sampled from the piping for supplying water from the ultrapure water production unit to the use point is made to flow in series through the different types of the water quality measurement instruments coupled in series in two stages or more, the monitoring water required for measuring the water quality is shared in these instruments and thereby the quantity of monitoring water is reduced. As a result, the scale of the ultrapure water production unit is reduced and the cost of the unit can be reduced.