| 摘要 |
PROBLEM TO BE SOLVED: To provide a small force sensor device having high force detection sensitivity. SOLUTION: The force sensor device includes: a force sensor element 5 including a vibration element 20 having vibration parts 20a, 20b and fixing parts 25a, 25b connecting two facing ends of the vibration element 20; a base substrate 10; and wire members 13 having elastic force and including one ends connected to the fixing parts, respectively and the other ends connected to the base substrate. The other ends of the wire members 13 having respective one ends fixed to the base substrate 10 are connected to at least two points across the vibration parts 20a, 20b. COPYRIGHT: (C)2011,JPO&INPIT
|
