| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an LED including, as a transparent electrode, a transparent conductive film exhibiting good conductivity and for improving efficiency of the LED for taking out light, and a method of manufacturing the LED without increasing conventional LED manufacturing processes by a simple application method for reducing production time and production cost. <P>SOLUTION: In the light emitting diode including, on a substrate 4, at least an n-type semiconductor layer 3, an active layer 1 comprising 30 or less quantum well layers, a p-type semiconductor layer 2 and a transparent conductive film 7 which are laminated in the order, the transparent conductive film 7 is made of oxide titanium containing niobium or tantalum doped. The transparent conductive film 7 is obtained by applying, on the p-type semiconductor layer 2, a precursor liquid containing (A) a reaction product comprising a titanium compound reacted with hydrogen peroxide and (B) a reaction product comprising a niobium compound or a tantalum compound reacted with hydrogen peroxide, baking, and thereafter annealing by heating under a reducing atmosphere. <P>COPYRIGHT: (C)2011,JPO&INPIT |
