Ultrasonic Measurement Method, Ultrasonic Measurement Apparatus, and Ultrasonic Sensor

摘要

An ultrasonic measurement method and an ultrasonic measurement apparatus are capable of performing an inspection for a short time with a high SN ratio and a small variation (that depends on an inspection direction) in sensitivity in a process for detecting a defect in all directions at 360 degrees using a matrix array sensor without performing mechanical scanning in all directions, while reducing noise that is caused by a bottom surface echo. An element selecting circuit selects a group of a plurality of ultrasonic transducer elements for transmission from among ultrasonic transducer elements that constitute a two-dimensional array sensor so that the ultrasonic transducer elements for selected for transmission are arranged in line symmetry with respect to a first line symmetric axis to set the group selected for transmission. The element selecting circuit selects a group of a plurality of ultrasonic transducer elements for reception so that the ultrasonic transducer elements selected for reception are arranged in line symmetry with respect to a second line symmetric axis that is perpendicular to the first line symmetric axis to set the group selected for reception. A transmitting element selector selects, as transmitting elements, the ultrasonic transducer elements set by the element selecting circuit. A receiving element selector selects, as receiving elements, the ultrasonic transducer elements set by the element selecting circuit.