GATE VALVE STRUCTURE AND SUBSTRATE PROCESSOR EQUIPED WITH THE SAME

摘要

Disclosed is a gate valve structure including a valve box having a port with a first valve seat and a second valve seat and a valve provided with a sealing member intended to seal the port. The gate valve structure is further provided with a shielding member capable of deflecting to sit on the second valve seat when the valve closes the port thereby shielding the room between the sealing member and the port such that the shielding member deflects to maintain contact between the shielding member and the second valve seat when the valve closes the port under the normal condition as well as under a high temperature.