| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for achieving a force sensor element with a small size, a small area and a high sensitivity, used for a game controller, a navigation device, PND, IMU (inertial attitude measuring device), and the like. SOLUTION: The force sensor element is provided with a stress sensitive element 5 and a first beam 10 and a second beam 20. The first beam 10 and the second beam 20 are arranged on the upper surface and under surface of the stress sensitive element 5, respectively. The first beam 10 has grooves 12a, 12b, 14a, and 14b, in a direction intersecting the extension direction. The second beam 20 has grooves 22a, 22b, 24a and 24b, in a direction intersecting the extension direction. Ends 11a and 11b of the first beam 10 and ends 21a and 21b of the second beam 20 are fixed to the stress sensitive element 5, and a force receiving surface is formed in substantially the center of the first beam 10. COPYRIGHT: (C)2011,JPO&INPIT
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