| 摘要 |
The present invention relates to a rocker door valve capable of selectively closing a process chamber and a transfer chamber. The present invention achieves a valve actuator assembly having a novel configuration, in which the shape and structure of a main block, a cylinder guide block, etc. of a valve actuator are improved to enable easy replacement of a cylinder, thereby enabling only components to be individually separated without having to disassemble the entirety of the equipment upon the occurrence of a valve failure, and thus significantly shortening the pause time of the equipment during the replacement of the valve. In addition, the present invention applies a dual seal system to the cylinders of the valve actuator to minimize etching of the seal, and employs a bushing in an inner shaft fixing portion to enable accurate vertical motion when the cylinders are driven in the upward and downward directions. Further, the present invention improves the interlinked motion mechanism between the cylinders and blocks of the valve actuator to enable an up/down and individual seal-type motion mechanism, in which a left chamber and a right chamber have an individual seal, to thereby improve the overall opening/closing performance of the valve, to maintain a vacuum state, and to shorten the pause time of the equipment. |
