SEMICONDUCTOR SUBSTRATE, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING THE SEMICONDUCTOR SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To form crystal thin films of compound semiconductors on inexpensive Si substrates. SOLUTION: A semiconductor substrate includes a base substrate, an insulating layer, and an Si crystal layer in this order. The semiconductor substrate includes an annealed seed crystal provided on the Si crystal layer, and a compound semiconductor subjected to lattice matching or pseudo lattice matching to the seed crystal. An electronic device includes a substrate, an insulating layer provided on the substrate, an Si crystal layer provided on the insulating layer, an annealed seed crystal provided on the Si crystal layer, a compound semiconductor subjected to lattice matching or pseudo lattice matching to the seed crystal, and a semiconductor device formed by the compound semiconductor. COPYRIGHT: (C)2011,JPO&INPIT