| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To improve the accuracy in measuring the flow rate of gas which is also a fluid. <P>SOLUTION: This device 1 for measuring flow rate includes a channel part 21, which forms a channel of gas, a lattice-shaped channel-dividing member 22 which divides the channel into a plurality of divided channels, a flow sensor 31 which detects the flow rate of the gas in some divided channel, and a holding part 32 which holds the flow sensor 31. The holding part 32 holds the flow sensor 31 so that the detecting surface of the flow sensor 31 is exposed to the divided channel F, which differs from the divided channel, wherein the holding part 32 is disposed and so holds the flow sensor 31 that the surface forming the inner wall of the divided channel F and the detecting surface of the flow sensor 31 are positioned substantially on the same plane. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
