摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric device which has the support structure of an oscillating piece adaptive to downsizing of the piezoelectric device, and can secure high reliability. <P>SOLUTION: The piezoelectric device 100 includes a package base 10, a lid 20 formed above the package base 10 and sealing the package base 10, and the oscillating piece 40 housed in a cavity 1 formed of the package base 10 and lid 20. The oscillating piece 40 includes a base 42, an arm portion 44 extending horizontally from the base 42, and a support portion 46 which is connected to the base 42 and at least a part of which is positioned below the arm portion 44. The lower surface of the support member 46 and the inside bottom surface 18 of the package base 10 are bonded together with an adhesive 17. <P>COPYRIGHT: (C)2011,JPO&INPIT |