SUBSTRATE TRANSPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A substrate transfer device and a method thereof are provided to efficiently transfer a substrate by reducing the transfer path of the substrate after reducing the length of a support type switching unit than the size of the substrate. CONSTITUTION: A substrate transfer device(2) transfers a substrate(W) in an X direction. The substrate transfer device comprises a roller conveyer(30), an entrance flotation stage(10), and a transfer unit(6). The entrance flotation stage floats the substrate with the compressed air. A substrate coating unit(3) spreads a processing liquid on the substrate. The substrate coating unit comprises a nozzle unit(5) which includes a slit nozzle(55) discharging the processing liquid and a nozzle cleaning stand-by unit(9). The nozzle cleaning stand-by unit cleans the slit nozzle.