| 摘要 |
<p>Performed is a process of setting, on a mounting table, an adjustment substrate, which is provided with a slit of a preset width extended toward a center from a peripheral portion of the adjustment substrate; irradiating the laser beam toward a light receiving surface of a light energy measuring device, which is disposed on a front surface side of the adjustment substrate, from a rear surface side of the adjustment substrate through the slit; and measuring a variation in an energy amount of the laser beam irradiated onto the light receiving surface by the light energy measuring device while moving the laser emitting device in the optical axis direction, and adjusting a position of the laser emitting device in the optical axis direction to a desired position based on the variation in the energy amount on the light receiving surface.</p> |
