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发明名称
APPARATUS FOR LEVELING A HEAD PLATE OF A PROBER SYSTEM
摘要
申请公布号
KR100984769(B1)
申请公布日期
2010.10.01
申请号
KR20030090712
申请日期
2003.12.12
申请人
发明人
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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