摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein an incident efficiency is varied by the change of a focal distance when the light emitted from the plasma generated by irradiating a sample with a laser beam is condensed to be incident on the incident edge face of an optical fiber. SOLUTION: A part of plasma emission light (c) is branched before the plasma emission light (c) is condensed by a condensing lens 7 to enter the light receiving edge face 12 of the optical fiber and the plasma emission branched light c<SB>1</SB>is detected by an imaging element 14 fixed at a definite position to monitor the image dimension or image area of the plasma emission branched light c<SB>1</SB>and the position of the condensing lens 7 is moved/adjusted in an optical axis direction so that the image dimension or image area is held to a definite size. COPYRIGHT: (C)2010,JPO&INPIT
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