发明名称 COMPOSITE SUBSTRATE, ELASTIC WAVE DEVICE USING THE SAME, AND METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE
摘要 In a composite substrate 10, the piezoelectric substrate 12 which is capable of transmitting an elastic wave and a support substrate 14 which a smaller thermal expansion coefficient than the piezoelectric substrate 12 are bonded to each other. The in-plane maximum thermal strain amount which is the largest thermal strain amount in the plane of the composite substrate 10 has a minimum value and a maximum value when the piezoelectric substrate 12 and the support substrate 14 are relatively rotated 0° to 360°, and the piezoelectric substrate 12 and the support substrate 14 are bonded to each other so that the in-plane maximum thermal strain amount has the minimum value or a value in the vicinity thereof.
申请公布号 US2010244631(A1) 申请公布日期 2010.09.30
申请号 US20100714666 申请日期 2010.03.01
申请人 NGK INSULATORS, LTD. 发明人 KOBAYASHI HIROKI;HORI YUJI;IWASAKI YASUNORI
分类号 H01L41/053;H01L41/18;H01L41/22 主分类号 H01L41/053
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