发明名称 |
COMPOSITE SUBSTRATE, ELASTIC WAVE DEVICE USING THE SAME, AND METHOD FOR MANUFACTURING COMPOSITE SUBSTRATE |
摘要 |
In a composite substrate 10, the piezoelectric substrate 12 which is capable of transmitting an elastic wave and a support substrate 14 which a smaller thermal expansion coefficient than the piezoelectric substrate 12 are bonded to each other. The in-plane maximum thermal strain amount which is the largest thermal strain amount in the plane of the composite substrate 10 has a minimum value and a maximum value when the piezoelectric substrate 12 and the support substrate 14 are relatively rotated 0° to 360°, and the piezoelectric substrate 12 and the support substrate 14 are bonded to each other so that the in-plane maximum thermal strain amount has the minimum value or a value in the vicinity thereof. |
申请公布号 |
US2010244631(A1) |
申请公布日期 |
2010.09.30 |
申请号 |
US20100714666 |
申请日期 |
2010.03.01 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
KOBAYASHI HIROKI;HORI YUJI;IWASAKI YASUNORI |
分类号 |
H01L41/053;H01L41/18;H01L41/22 |
主分类号 |
H01L41/053 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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