| 摘要 |
PROBLEM TO BE SOLVED: To provide a prober frame and a TFT array inspecting device capable of checking contact location of a probe pin without using a tape for observing contact locations. SOLUTION: An imaging means is prepared near a probe pin of a prober frame 10, contact conditions of the probe pin and an electrode is supervised by images acquired from the imaging means, and contact location of the probe pin is checked. The prober frame is equipped with a frame bar constituting a frame body of the prober frame and the imaging means juxtaposed on at least one probe pin array, consisting of a plurality of probe pins for coming into contact with an electrode prepared on a TFT substrate, and at least one probe pin array both on a opposed surface facing the TFT substrate 6 in the frame bar. The imaging means outputs at least one probe pin image of the probe pin array juxtaposed to obtain images for the positional relationship of the probe pin array with respect to the electrode arrangement from the imagery output. COPYRIGHT: (C)2010,JPO&INPIT
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