| 摘要 |
PROBLEM TO BE SOLVED: To detect an obstacle on a backup table independent of movement of a movable rail. SOLUTION: A substrate carrier is equipped with a movable rail 38 which is moved in accordance with the width of a substrate 8 that is transported. It includes an obstacle detecting means (obstacle detection sensor 50) arranged to a substrate carrier body, for detecting an obstacle (backup pin 44) within the range of movement of the movable rail 38. The obstacle detecting apparatus is used to detect presence of an obstacle within a movement range of the movable rail before the movable rail is moved, and when no obstacle is detected, the movable rail is moved. COPYRIGHT: (C)2010,JPO&INPIT
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