METHOD FOR MANUFACTURING NOZZLE SUBSTRATE, NOZZLE SUBSTRATE MANUFACTURED BY MANUFACTURING METHOD THEREOF, METHOD FOR MANUFACTURING LIQUID DROPLET DISCHARGING HEAD, LIQUID DROPLET DISCHARGING HEAD MANUFACTURED BY MANUFACTURING METHOD THERE OF, AND LIQUID DROPLET DISCHARGING DEVICE

摘要

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a nozzle substrate capable of manufacturing the nozzle substrate which is stable in meniscus, can obtain excellent discharge performance and is also high in accuracy of a nozzle diameter. Ž<P>SOLUTION: The method for manufacturing the nozzle substrate 1 having two stage nozzle hole 11 with the opening cross section gradually increased from the tip side in a discharge direction to the rear end side includes the steps of: providing a two layer substrate structure dividing the substrate for each stage of the nozzle hole 11; independently forming a first nozzle part 11a or a second nozzle part 11b on each of respective layer substrates 1a and 1b; and joining both the layers 1a and 1b after a liquid repellant film 105 or a lyophilic film 123 is formed at a required place. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž