发明名称 |
DOPANT PROFILE MEASUREMENT MODULE, METHOD AND APPARATUS |
摘要 |
An apparatus comprises: a first signal source; a dopant profile measurement module (DPPM) configured to receive a portion of the signal from the signal source; a probe tip connected to the reflective coupler; a load connected in parallel with the probe tip; and a second signal source connected to a load, wherein the signal source is configured to provide an amplitude-modulated (AM) signal to the probe tip. A method is also described.
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申请公布号 |
US2010244870(A1) |
申请公布日期 |
2010.09.30 |
申请号 |
US20100749833 |
申请日期 |
2010.03.30 |
申请人 |
AGILENT TECHNOLGIES, INC. |
发明人 |
TANBAKUCHI HASSAN;STANCLIFF ROGER B.;GRAHAM TIMOTHY M.;HAN WENHAI |
分类号 |
G01R31/02;G01R31/26 |
主分类号 |
G01R31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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