发明名称 DYNAMIC QUANTITY DETECTION SENSOR
摘要 <P>PROBLEM TO BE SOLVED: To provide a dynamic quantity detection sensor capable of reducing a difference in sensitivity in a multiaxis direction without reducing sensitivity. <P>SOLUTION: The dynamic quantity detection sensor includes: a support 21 having an opening 23; a weight 22 positioned inside the opening 23 of the support 21; a beam 13 for swingably supporting the weight 22; and detecting elements 15, 16 that are provided in the beam 13 and output signals according to a dynamic quantity in a multiaxis direction based on the amount of deflection of the beam 13. At least one portion in an extending direction of the beam 13 is formed thinner than other parts so that a difference in sensitivity to the dynamic quantity in the multiaxis direction detected by the output of the detecting elements 15, 16 is within a prescribed range. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010216836(A) 申请公布日期 2010.09.30
申请号 JP20090060861 申请日期 2009.03.13
申请人 ALPS ELECTRIC CO LTD 发明人 KOMAI EIICHI;WATANABE TOSHINORI;UMETSU EIJI;ISHIZONE MASAHIKO;KOBAYASHI TOSHIHIRO;IGARASHI KAZUSATO;TANAKA KENICHI;WAGA SATOSHI;GOCHO HIDENORI
分类号 G01P15/09;G01P15/12;G01P15/18;H01L29/84;H01L41/08;H01L41/22 主分类号 G01P15/09
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