| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device, which includes a main cell region and a sense cell region, and improves current detection accuracy in the sense cell region. SOLUTION: A separation region is arranged between the main cell region and sense cell region. The separation region includes a crystal defect region. The crystal defect region formed in the separation region suppresses carrier transfer between the main cell region and sense cell region. The crystal defect facilitates disappearance of a carrier as a recombination center of the carrier. COPYRIGHT: (C)2010,JPO&INPIT
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