| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage apparatus for suppressing a vibration when a stage is moved without complicating a constitution. SOLUTION: The stage apparatus includes a stage mechanism, a counter mass mechanism and a controller. The controller includes a mounter mass control unit for controlling the stage mechanism, and a counter mass control unit for controlling the counter mass mechanism. A movable plane of a counter mass and a movable plane of the stage are parallel to each other, and disposed so as to be spaced from each other. COPYRIGHT: (C)2010,JPO&INPIT
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